Influence of electronic stopping on sputtering induced by cluster impact on metallic targets

Physical Review B - Condensed Matter and Materials Physics

Volumn 79, Issue 14, 2009, Pages

  Sandoval, Luis ^a   Urbassek, Herbert M ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 66049158686     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.79.144115     Document Type: Article

References (39)

1. Sputtering by Particle Bombardment I, edited by, R. Behrisch, (Springer, Berlin, 1981).
2. Sputtering by Particle Bombardment, Topics Appl. Physics Vol. 110, edited by, R. Behrisch, and, W. Eckstein, (Springer, Berlin, 2007).
3. P. Sigmund, Appl. Phys. Lett. 25, 169 (1974) 10.1063/1.1655425
4. P. Sigmund, Appl. Phys. Lett. 27, 52 (1975). 10.1063/1.88552
5. J. Lindhard and M. Scharff, Phys. Rev. 124, 128 (1961). 10.1103/PhysRev.124.128
6. M. M. Jakas and D. E. Harrison, Jr., Phys. Rev. B 30, 3573 (1984). 10.1103/PhysRevB.30.3573
7. M. M. Jakas and D. E. Harrison, Jr., Phys. Rev. B 32, 2752 (1985). 10.1103/PhysRevB.32.2752
8. D. E. Harrison, Jr. and M. M. Jakas, Nucl. Instrum. Methods Phys. Res. B 15, 25 (1986). 10.1016/0168-583X(86)90245-4
9. Y. Zhong, K. Nordlund, M. Ghaly, and R. S. Averback, Phys. Rev. B 58, 2361 (1998). 10.1103/PhysRevB.58.2361
10. E. E. Zhurkin and A. S. Kolesnikov, Nucl. Instrum. Methods Phys. Res. B 202, 269 (2003). 10.1016/S0168-583X(02)01868-2
11. J. Samela, J. Kotakoski, K. Nordlund, and J. Keinonen, Nucl. Instrum. Methods Phys. Res. B 239, 331 (2005). 10.1016/j.nimb.2005.05.047
12. D. M. Duffy and A. M. Rutherford, J. Phys.: Condens. Matter 19, 016207 (2007). 10.1088/0953-8984/19/1/016207
13. C. P. Flynn and R. S. Averback, Phys. Rev. B 38, 7118 (1988). 10.1103/PhysRevB.38.7118
14. M. W. Finnis, P. Agnew, and A. J. E. Foreman, Phys. Rev. B 44, 567 (1991). 10.1103/PhysRevB.44.567
15. S. Prönnecke, A. Caro, M. Victoria, T. Diaz de la Rubia, and M. W. Guinan, J. Mater. Res. 6, 483 (1991). 10.1557/JMR.1991.0483
16. A. Caro and M. Victoria, Phys. Rev. A 40, 2287 (1989). 10.1103/PhysRevA.40.2287
17. T. J. Colla and H. M. Urbassek, Nucl. Instrum. Methods Phys. Res. B 164-165, 687 (2000). 10.1016/S0168-583X(99)01110-6
18. S. Zimmermann and H. M. Urbassek, Nucl. Instrum. Methods Phys. Res. B 228, 75 (2005). 10.1016/j.nimb.2004.10.026
19. S. Zimmermann and H. M. Urbassek, Nucl. Instrum. Methods Phys. Res. B 255, 208 (2007). 10.1016/j.nimb.2006.11.067
20. J. R. Beeler, Jr., Radiation Effects Computer Experiments (North-Holland, Amsterdam, 1983).
21. T. J. Colla, R. Aderjan, R. Kissel, and H. M. Urbassek, Phys. Rev. B 62, 8487 (2000). 10.1103/PhysRevB.62.8487
22. L. Sandoval and H. M. Urbassek, Nucl. Instrum. Methods Phys. Res. B (to be published).
23. P. Sigmund, R. Bimbot, H. Geissel, H. Paul, and A. Schinner, J. ICRU 5, 1 (2005).
24. O. B. Firsov, Sov. Phys. JETP 36, 1076 (1959).
25. P. M. Echenique and M. E. Uranga, in Interaction of Charged Particles with Solids and Surfaces, NATO Advanced Studies Institute, Series B: Physics, edited by, A. Gras-Martí, H. M. Urbassek, N. R. Arista, and, F. Flores, (Plenum Press, New York, 1991), Vol. 271, p. 39.
26. V. U. Nazarov, J. M. Pitarke, Y. Takada, G. Vignale, and Y.-C. Chang, Phys. Rev. B 76, 205103 (2007). 10.1103/PhysRevB.76.205103
27. I. Koponen, J. Appl. Phys. 72, 1194 (1992). 10.1063/1.351804
28. I. Koponen, Phys. Rev. B 47, 14011 (1993). 10.1103/PhysRevB.47.14011
29. R. S. Averback and T. Diaz de la Rubia, in Solid State Physics, edited by, H. Ehrenreich, and, F. Spaepen, (Academic Press, Boston, 1998), Vol. 51, p. 281.
30. Z. Lin and L. V. Zhigilei, Proc. SPIE 6261, 62610U (2006). 10.1117/12.674636
31. Z. Lin, L. V. Zhigilei, and V. Celli, Phys. Rev. B 77, 075133 (2008). 10.1103/PhysRevB.77.075133
32. J. Hohlfeld, S.-S. Wellershoff, J. Güdde, U. Conrad, V. Jähnke, and E. Matthias, Chem. Phys. 251, 237 (2000). 10.1016/S0301-0104(99)00330-4
33. H. M. Urbassek and J. Michl, Nucl. Instrum. Methods Phys. Res. B 22, 480 (1987). 10.1016/0168-583X(87)90146-7
34. H. M. Urbassek, in Handbook of Surface Science, edited by, E. Hasselbrink, and, B. I. Lundqvist, (Elsevier, Amsterdam, 2008), Vol. 3, Chap., pp. 871-913.
35. S. Bouneau, A. Brunelle, S. Della-Negra, J. Depauw, D. Jacquet, Y. LeBeyec, M. Pautrat, M. Fallavier, J. C. Poizat, and H. H. Andersen, Phys. Rev. B 65, 144106 (2002). 10.1103/PhysRevB.65.144106
36. J. Samela and K. Nordlund, Phys. Rev. B 76, 125434 (2007). 10.1103/PhysRevB.76.125434
37. A. Duvenbeck, O. Weingart, V. Buss, and A. Wucher, N. J. Phys. 9, 38 (2007). 10.1088/1367-2630/9/2/038
38. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
39. C. L. Kelchner, D. M. Halstead, L. S. Perkins, N. M. Wallace, and A. E. DePristo, Surf. Sci. 310, 425 (1994). 10.1016/0039-6028(94)91405-2