A novel configurable mems inertial switch using microscale liquid-metal droplet

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 793-796

  Kwanghyun, Yoo ^a   Joonwon, Kim ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE COMPONENTS; CHANNEL CONFIGURATION; CONFIGURABLE; CONTACT ANGLE HYSTERESIS; CONTACT SURFACE; EFFECTIVE MECHANISMS; ELECTRICAL CONDUCTION; HIGH DENSITY; INERTIAL SWITCH; LIQUID METAL DROPLETS; MICROSCALE LIQUID; NON-WETTING; PROOF MASS;

CONTACT ANGLE; DROP FORMATION; LIQUIDS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; SURFACE TENSION; WETTING;

METALS;

EID: 65949112272     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805502     Document Type: Conference Paper

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