A DC to 10-GHz 6-b RF MEMS time delay circuit

IEEE Microwave and Wireless Components Letters

Volumn 16, Issue 5, 2006, Pages 305-307

  Nordquist, Christopher D ^a,b   Dyck, Christopher W ^a,b   Kraus, Garth M ^a,b   Reines, Isak C ^a,b   Goldsmith, Charles L ^a,c   Chowan, William D ^a,b   Plut, Thomas A ^a,b   Austin IV, Franklin ^a,d   Finnegan, Patrick S ^a,e   Ballance, Mark H ^a,d,e   Sullivan, Charles T ^a,b  

^a IEEE   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c MEMtronics Inc   (United States)

^d Plus Group   (United States)

^e L and M Technologies   (United States)

Author keywords

Delay circuits; Microelectromechanical (MEMS) devices; Microwave phase shifters; Switches

Indexed keywords

MICROWAVE PHASE SHIFTERS; SERIES-SHUNT SP4T SWITCHING NETWORKS; THICK ALUMINA;

ALUMINA; COMPUTER NETWORKS; DELAY CIRCUITS; ELECTRIC NETWORK ANALYSIS; SWITCHING SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 33646396809     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2006.873600     Document Type: Article

References (14)

1. R. J. Mailloux, Phased Array Antenna Handbook. Norwood, MA: Artech House, 1994.
2. J. J. Yao, "RF MEMS from a device perspective," J. Micromech. Microeng., vol. 10, pp. R9-R38, Dec. 2000.
3. G.-L. Tan, R. E. Mihailovich, J. B. Hacker, J. F. DeNatale, and G. M. Rebeiz, "Low-loss 2- and 4-bit TTD MEMS phase shifters based on SP4T switches," IEEE Trans. Microw. Theory Tech., vol. 51, pp. 297-303, Jan. 2003.
4. B. Pillans, S. Eshelman, A. Malczewski, J. Ehmke, and C. Goldsmith, "Ka-band RF MEMS phase shifters," IEEE Microw. Guided Wave Lett., vol. 9, no. 12, pp. 520-522, Dec. 1999.
5. J. B. Hacker, R. E. Mihailovich, M. Kim, and J. D. DeNatale, "A Ka-band 3-bit RF MEMS true-time-delay network," IEEE Trans. Microw. Theory Tech., vol. 51, no. 1, pp. 305-308, Jan. 2003.
6. N. S. Barker and G. M. Rebeiz, "Optimization of distributed MEMS phase shifters," in IEEE MTT-S Int. Dig., 1999, pp. 299-302.
7. H.-T. Kim, J.-H. Park, Y.-K. Kim, and Y. Kwon, "V-band low-loss and low-voltage distributed MEMS digital phase shifter using metal-air-metal capacitors," in IEEE MTT-S Int. Dig., 2002, pp. 341-344.
8. A. Malczewski, S. Eshelman, B. Pillans, J. Ehmke, and C. E. Goldsmith, "X-band RF MEMS phase shifter for phased array applications," IEEE Microw. Guided Wave Lett., vol. 9, no. 12, pp. 517-519, Dec. 1999.
9. H.-T. Kim, J.-H. Park, J. Yim, Y.-K. Kim, and Y. Kwon, "A compact V-band 2-bit reflection-type MEMS phase shifter," IEEE Microw. Wireless Compon. Lett., vol. 12, no. 9, pp. 324-326, Sep. 2002.
10. G. E. Tan, R. E. Mihailovich, J. B. Hacker, J. F. DeNatale, and G. M. Rebeiz, "A 4-bit Mniature X-band MEMS phase shifter using switched-LC networks," in IEEE MTT-S Int. Dig., 2003, pp. 1477-1480.
11. R. P. Coats, "An octave-band switched-line microstrip 3-b diode phase shifter," IEEE Trans. Microw. Theory Tech., vol. MTT-21, no. 7, pp. 444-449, Jul. 1973.
12. GeneSYS v. 2003.03. Norcross, GA: Eagleware, 2003.
13. [13[ Sonnet em Suite v. 9. North Syracuse, NY: Sonnet Software, 2004.
14. C. W. Dyck, T. A. Plut, C. D. Nordquist, P. S. Finnegan, F. Austin, I. Reines, and C. E. Goldsmith, "Fabrication and characterization of ohmic contacting RF MEMS switches," in Proc. SPIE, 5344, 2004, pp. 79-88.