Design and fabrication of a gaussian-shaped AT-cut quartz crystal resonator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 908-911

  Abe, T ^a   Kishi, H ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AT-CUT QUARTZ CRYSTALS; ENERGY TRAPPING; EXPERIMENTAL VERIFICATION; FINITE ELEMENT ANALYSIS; GAUSSIAN; GAUSSIAN TYPE FUNCTION; MEMS TECHNOLOGY; RESONANT CHARACTERISTICS; THICKNESS DISTRIBUTIONS; WAFER EDGE;

MEMS; MICROELECTROMECHANICAL DEVICES; OXIDE MINERALS; QUARTZ; THREE DIMENSIONAL;

CRYSTAL RESONATORS;

EID: 65949108392     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805531     Document Type: Conference Paper

References (10)

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