A miniaturized biconvex quartz-crystal microbalance with large-radius spherical thickness distribution

Applied Physics Letters

Volumn 85, Issue 13, 2004, Pages 2652-2654

  Li, Li ^a   Esashi, Masayoshi ^a   Abe, Takashi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; ELECTRODES; FABRICATION; MELTING; PHOTORESISTS; REACTIVE ION ETCHING; RESONANCE; SHEAR FLOW; THERMAL EFFECTS; VAPORS; VIBRATIONS (MECHANICAL); VISCOELASTICITY;

FREQUENCY VIBRATIONS; IMMUNOSENSING; QUARTZ CRYSTAL MICROBALANCE (QCB); THICKNESS SHEAR MODE (TSM);

CRYSTALS;

EID: 7544221958     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1796535     Document Type: Article

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