Grazing incidence X-ray scattering study of sol-gel derived indium tin oxide thin films

Thin Solid Films

Volumn 517, Issue 17, 2009, Pages 5151-5156

  Yang, L L ^a   Ge, D T ^a   He, X D ^a   He, F ^a   Li, Y B ^a   Zhang, S ^b  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Grazing incidence X ray scattering; ITO films; Thermal annealing

Indexed keywords

ANNEALING TEMPERATURES; FRACTAL STRUCTURES; GRAZING INCIDENCE; GRAZING INCIDENCE SMALL-ANGLE X-RAY SCATTERING; GRAZING INCIDENCE X-RAY SCATTERING; HIGH TEMPERATURE; INDIUM TIN OXIDE THIN FILMS; ITO FILMS; LOW TEMPERATURES; OPTOELECTRONIC PROPERTIES; PHOTO-CATALYTIC; SOL-GEL DIP-COATING METHOD; STRUCTURAL EVOLUTION; TEMPERATURE RISE; THERMAL ANNEALING; TRANSPARENT CONDUCTING OXIDE FILMS;

ANNEALING; CONDUCTIVE FILMS; FRACTALS; GELATION; GELS; INDIUM; PHOTOLITHOGRAPHY; SCATTERING; SOL-GEL PROCESS; SOL-GELS; SOLS; SURFACE ROUGHNESS; THIN FILMS; TIN; TIN OXIDES; X RAY SCATTERING;

OXIDE FILMS;

EID: 65649136212     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.03.047     Document Type: Article

References (20)

1. Arfsten N.J. J. Non-Cryst. Solids 63 (1984) 243
2. Alam M.J., and Cameron D.C. Thin Solid Films 377-378 (2000) 455
3. De A., Biswas P.K., and Manara J. Mater. Charact. 58 (2007) 695
4. Ramanan S.R. Thin Solid Films 389 (2001) 210
5. Daoudi K., Canut B., Blanchin M.G., Sandu C.S., Teodorescu V.S., and Roger J.A. Mater. Sci. Eng., C 21 (2002) 315
6. Hench L.L., and West J.K. Chem. Rev. 90 (1990) 44
7. Levine J.R., Cohen J.B., Chung Y.W., and Georgopoulos P. J. Appl. Cryst. 22 (1989) 528
8. Muller-Buschbaum P. Anal. Bioanal. Chem. 376 (2003) 3-10
9. Babonneau D., Suárez-García A., Gonzalo1 J., Videnovic I.R., Garnier M.G., Oelhafen P., Jaouen M., and Naudon A. Mater. Res. Soc. Symp. Proc. 678 (2001) EE5.6.1-EE5.6.6
10. Renaud G., Lazzari R., Revenant C., Barbier A., Noblet M., Ulrich O., Leroy F., Jupille J., Borensztein Y., Henry C.R., Devile J.P., Scheurer F., Mane J.M., and Fruchart O. Science 300 (2003) 1416
11. Pfeiffer F., Zhang W., and Robinson I.K. Appl. Phys. Lett. 84 11 (2004) 1847
12. Hazra S., Gibaud A., Désert A., Sella C., and Naudon A. Phys. B 283 (2000) 98
13. Posedel D., Turković A., Dubček P., and Orel Z.C. Mater. Sci. Eng. B 90 (2002) 154
14. Banerjee S., Sanyal M.K., Datta A., Kanakaraju S., and Mohan S. Phys. Rev., B 54 (1996) 16377
15. Wong P.-z. Phys. Rev. B 32 (1985) 7417
16. Xie R., Yang B.x., and Jiang B. Phys. Rev. B. 50 6 (1994) 3636
17. Schmidt P.W. J. Appl. Cryst. 24 (1991) 414
18. Cohaut N., Guet J.M., and Diduszko R. Carbon 34 (1996) 675
19. Turković A., Orel B., Lavčević M.L., Dubček P., Orel Z.C., and Bernstorff S. Sol. Energy Mater. Sol. Cells 91 (2007) 1301
20. Stoica T.F., Teodorescu V.S., Blanchin M.G., Stoica T.A., Gartner M., Losurdo M., and Zaharescu M. Mater. Sci. Eng., B. 101 (2003) 224