Development of chromium nitride coatings substituting titanium nitride

Surface and Coatings Technology

Volumn 86-87, Issue PART 1, 1996, Pages 184-191

  Berg, Günter ^a   Friedrich, Christoph ^a   Broszeit, Erhard ^a   Berger, Christina ^a  

^a Institut für Werkstoffkunde   (Germany)

Author keywords

Chromium nitride; Coating properties; Magnetron sputtering; Scale up

Indexed keywords

ADHESION; CHARACTERIZATION; CHROMIUM COMPOUNDS; DEPOSITION; HARDNESS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; PHASE COMPOSITION; RESIDUAL STRESSES; THICKNESS MEASUREMENT; TITANIUM NITRIDE; TRIBOLOGY;

BIAS VOLTAGE; CHROMIUM NITRIDE; PHASE ANALYSIS; SPUTTERING SYSTEMS;

CERAMIC COATINGS;

EID: 0038930520     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)03042-3     Document Type: Article

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