Effect of oxygen incorporation on structural and properties of Ti-Si-N nanocomposite coatings deposited by reactive unbalanced magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 4, 2006, Pages 974-977

  Ding, X Z ^a   Zeng, X T ^a   Liu, Y C ^a   Zhao, L R ^b  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; FRICTION; MAGNETRON SPUTTERING; TITANIUM; WEAR OF MATERIALS; X RAY DIFFRACTION;

ATOMIC RATIO; CUBIC TIN PHASE; NANOCOMPOSITE COATINGS;

NANOSTRUCTURED MATERIALS;

EID: 33745496539     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2202128     Document Type: Article

References (20)

1. S. Veprek, S. Reiprich, and L. Shizhi, Appl. Phys. Lett. 66, 2640 (1995).
2. L. Shizhi, S. Yulong, and P. Hongrui, Plasma Chem. Plasma Process. 12, 287 (1992).
3. S. Veprek, M. Haussmann, and S. S. Reiprich, J. Vac. Sci. Technol. A 14, 46 (1996).
4. S. Veprek, A. Niederhofer, K. Moto, T. Bolom, H.-D. Mannling, P. Nesladek, G. Dollinger, and A. Bergmaier, Surf. Coat. Technol. 133-134, 152 (2000).
5. X. Sun, J. S. Reid, E. Kolawa, and M.-A. Nicolet, J. Appl. Phys. 81, 656 (1997).
6. P. M. Smith and J. S. Custer, Appl. Phys. Lett. 70, 3116 (1997).
7. L. Rebouta, C. J. Tavares, R. Aimo, Z. Wang, K. Pischow, E. Alves, T. C. Rojas, and J. A. Odriozola, Surf. Coat. Technol. 133-134, 234 (2000).
8. X. Z. Ding, X. T. Zeng, Y. C. Liu, Q. Yang, and L. R. Zhao, J. Vac. Sci. Technol. A 22, 2351 (2004).
9. X. T. Zeng, T. Goto, L. R. Zhao, X. Z. Ding, S. C. Liew, and G. Y. Li, J. Vac. Sci. Technol. A 23, 288 (2005).
10. X. Z. Ding, X. T. Zeng, and T. Goto, Surf. Coat. Technol. 198, 432 (2005).
11. J. Patscheider, T. Zehnder, and M. Diserens, Surf. Coat. Technol. 146-147, 201 (2001).
12. T. Aizawa, T. Akhadejdamrong, and A. Mitsuo, Surf. Coat. Technol. 177-178, 573 (2004).
13. T. Suszko, W. Gulbinski, and J. Jagielski, Surf. Coat. Technol. 194, 319 (2005).
14. S. Veprek, H.-D. Mannling, A. Niederhofer, D. Ma, and S. Mukherjee, J. Vac. Sci. Technol. B 22, L5 (2004).
15. S. Veprek, M. G. J. Veprek-Heijman, P. Karvankova, and J. Prochazka, Thin Solid Films 476, 1 (2005).
16. D. G. Teer, UK Patent No. 2,258,343; U.S. Patent No. 5,554,519; European Patent No. 0,521,045.
17. D. G. Teer, UK Patent No. 2,258,343; U.S. Patent No. 5,554,519; European Patent No. 0,521,045.
18. D. G. Teer, UK Patent No. 2,258,343; U.S. Patent No. 5,554,519; European Patent No. 0,521,045.
19. B. Window, Surf. Coat. Technol. 81, 92 (1996).
20. W. C. Oliver and G. M. Pharr, J. Mater. Res. 7, 1564 (1992).