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Volumn 72, Issue 4, 2004, Pages 427-438

Some features of molecular flow in a rotor-stator row with real topology

Author keywords

Monte Carlo method; Turbomolecular pump

Indexed keywords

CRYOGENICS; DIFFUSION; MECHANICAL PERMEABILITY; MOLECULAR STRUCTURE; MONTE CARLO METHODS; ROTORS; STATORS; TOPOLOGY;

EID: 0347379703     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2003.10.002     Document Type: Article
Times cited : (19)

References (9)
  • 2
    • 0347017984 scopus 로고
    • The axial flow molecular pump, 1st report
    • Sawada T., et al. The axial flow molecular pump, 1st report. Inst Phys Chem (Japan). 62(2):1968;49-64.
    • (1968) Inst Phys Chem (Japan) , vol.62 , Issue.2 , pp. 49-64
    • Sawada, T.1
  • 3
    • 0014995783 scopus 로고
    • The axial flow molecular pump, 2nd report
    • Sawada T., et al. The axial flow molecular pump, 2nd report. Bull JSME. 14(67):1971;48-57.
    • (1971) Bull JSME , vol.14 , Issue.67 , pp. 48-57
    • Sawada, T.1
  • 4
    • 0015584819 scopus 로고
    • The axial flow molecular pump, 3rd report
    • Sawada T., Taniguchi O. The axial flow molecular pump, 3rd report. Bull JSME. 16(92):1973;312-318.
    • (1973) Bull JSME , vol.16 , Issue.92 , pp. 312-318
    • Sawada, T.1    Taniguchi, O.2
  • 5
    • 0019549748 scopus 로고
    • The Statistical theory of turbomolecular pumps
    • Chu J.G., Hua Z.Y. The Statistical theory of turbomolecular pumps. J Vac Sci Techol A. 20(4):1982;1101-1104.
    • (1982) J Vac Sci Techol A , vol.20 , Issue.4 , pp. 1101-1104
    • Chu, J.G.1    Hua, Z.Y.2
  • 6
    • 0006847833 scopus 로고
    • General geometry calculations of one-stage molecular flow transmission probabilities for turbomolecular pumps
    • Katsimichas S., et al. General geometry calculations of one-stage molecular flow transmission probabilities for turbomolecular pumps. J Vac Sci Techol A. 13(6):1995;2954-2961.
    • (1995) J Vac Sci Techol A , vol.13 , Issue.6 , pp. 2954-2961
    • Katsimichas, S.1
  • 8
    • 84896779096 scopus 로고    scopus 로고
    • Direct simulation of free molecular flow in fully 3-D axial rotor
    • 2003-3777
    • Amoli A, et al. Direct simulation of free molecular flow in fully 3-D axial rotor. AIAA Paper 2003-3777.
    • AIAA Paper
    • Amoli, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.