Calibration of lateral force measurements in atomic force microscopy with a piezoresistive force sensor

Review of Scientific Instruments

Volumn 79, Issue 3, 2008, Pages

  Xie, Hui ^a   Vitard, Julien ^a   Haliyo, Sinan ^a   Ŕgnier, St́phane ^a   Boukallel, Mehdi ^b  

^a UNIVERSITÉ PIERRE ET MARIE CURIE   (France)

^b INSTITUT DE RADIOPROTECTION ET DE SÛRETÉ NUCLÉAIRE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; CANTILEVER BEAMS; COMPUTATIONAL METHODS; FORCE MEASUREMENT; PHOTODIODES; STIFFNESS;

FORCE LOADING; LASER MEASURING SYSTEM; PIEZORESISTIVE CANTILEVERS; PIEZORESISTIVE FORCE SENSORS;

FORCE CONTROL;

EID: 41549106273     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2894209     Document Type: Article

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