Characteristics of ITO electrode grown by linear facing target sputtering with ladder type magnetic arrangement for organic light emitting diodes

Thin Solid Films

Volumn 517, Issue 14, 2009, Pages 4043-4046

  Jeong, Jin A ^a   Kim, Han Ki ^a   Lee, Jae Young ^b   Lee, Jung Hwan ^b   Bae, Hyo Dae ^b   Tak, Yoon Heung ^b  

^a Kyung Hee University   (South Korea)

^b LG Display Co Ltd   (South Korea)

Author keywords

Indium tin oxide; Linear facing target sputtering (LFTS); OLED; Sheet resistance; Transmittance

Indexed keywords

ELECTRICAL AND OPTICAL PROPERTIES; FLOW RATIOS; HIGH QUALITIES; HIGH TRANSMITTANCES; INDIUM TIN OXIDE; INDIUM-TIN OXIDE ELECTRODES; ITO ELECTRODES; LINEAR FACING TARGET SPUTTERING (LFTS); LOW TEMPERATURES; LOW-SUBSTRATE TEMPERATURES; MAGNETIC ARRANGEMENTS; OLED; OPTIMIZED CONDITIONS; PLASMA DAMAGES; ROOM TEMPERATURES; SPUTTERING TECHNOLOGIES; TRANSMITTANCE;

ELECTRIC RESISTANCE; ELECTRODES; FACINGS; HELMET MOUNTED DISPLAYS; INDIUM; LIGHT EMISSION; LIGHT EMITTING DIODES; LIGHT SOURCES; OPTICAL PROPERTIES; PHOTOLITHOGRAPHY; PLASMAS; SHEET RESISTANCE; SURFACE PROPERTIES; TARGETS; TIN; TITANIUM COMPOUNDS;

ORGANIC LIGHT EMITTING DIODES (OLED);

EID: 65449122283     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.01.147     Document Type: Article

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