Silicon suspended resonant grating filters fabricated from a silicon-on-insulator wafer

IEEE Photonics Technology Letters

Volumn 20, Issue 10, 2008, Pages 851-853

  Ye, Jia Sheng ^a   Matsuyama, Naoki ^a   Kanamori, Yoshiaki ^a   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Guided mode resonance; Micro and nanolithograph technologies; Microoptical filter; Rigorous coupled wave method

Indexed keywords

EID: 65249106117     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2008.921840     Document Type: Article

References (11)

1. K. Inoue, Y. Sugimoto, N. Ikeda, Y. Tanaka, K. Asakawa, T. Maruyama, K. Miyashita, K. Ishida, and Y. Watanabe, "Ultra-Small GaAs-photonic-crystal- slab-waveguide-based near-infrared components: Fabrication, guided-mode identification, and estimation of low-loss and broad-band-width in straight-waveguides, 60° -bends and Y-splitters," Jpn. J. Appl. Phys., vol. 43, no. 9A, pp. 6112-6124, Sep. 2004.
2. C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. C. Hasnain, and Y. Suzuki, "Broad-band mirror (1.12-1.62 μm) using a subwavelength grating," IEEE. Photon. Electron. Lett., vol.16, no.7, pp. 1676-1678, Jul. 2004.
3. S. Boutami, B. B. Bakir, J. L. Leclercq, X. Letartre, C. Seassal, P. R. Romeo, P. Regreny, M. Garrigues, and P. Viktorovitch, "Photonic crystal-based MOEMS devices," IEEE J. Sel. Topics Quantum Electron., vol.13, no.2, pp. 244-252, Mar./Apr. 2007.
4. M. Kanskar, P. Paddon, V. Pacradouni, R. Morin, A. Busch, J. F. Young, S. R. Johnson, J. Mackenzie, and T. Tiedje, "Observation of leaky slab modes in an air-bridged semiconductor waveguide with a two-dimensional photonic lattice," Appl. Phys. Lett., vol.70, no.11, pp. 1438-1440, Mar. 17, 1997.
5. Y. Kanamori, T. Kitani, and K. Hane, "Guided-mode resonant grating filter fabricated on silicon-on-insulator substrate," Jpn. J. Appl. Phys., vol. 45, no. 3A, pp. 1883-1885, Mar. 2006.
6. S. H. Fan and J. D. Joannopoulos, "Analysis of guided resonances in photonic crystal slabs," Phys. Rev. B, vol.65, no.23, p. 235112-1/-8, Jun. 2002.
7. Y. Kanamori, T. Kitani, and K. Hane, "Control of guided resonance in a photonic crystal slab using microelectromechanical actuators," Appl. Phys. Lett., vol.90, no.3, p. 031911-1/-3, Jan. 2007.
8. T. K. Gaylord and M. G. Moharam, "Analysis and applications of optical diffraction by gratings," Proc. IEEE, vol.73, no.5, pp. 894-937, May 1985.
9. E. D. Palik, Ed., Handbook of Optical Constants of Solids Transl.: E. D. Palik. Orlando, FL: Academic, 1985.
10. K. Hane, T. Kobayashi, F. R. Hu, and Y. Kanamori, "Variable optical reflectance of a self-supported Si grating," Appl. Phys. Lett., vol.88, no.14, p. 141109-1/-3, Apr. 2006.
11. D. Rosenblatt, A. Sharon, and A. A. Friesem, "Resonant grating waveguide structures," IEEE J. Quantum Electron., vol.33, no.11, pp. 2038-2059, Nov. 1997.