Variable optical reflectance of a self-supported Si grating

Applied Physics Letters

Volumn 88, Issue 14, 2006, Pages

  Hane, Kazuhiro ^a   Kobayashi, Takashi ^a   Hu, Fang Ren ^a   Kanamori, Yoshiaki ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT INTERFERENCE; LIGHT PROPAGATION; LIGHT REFLECTION; MICROACTUATORS; RESONANCE; SILICON;

COUPLED-WAVE ANALYSIS; ELECTROSTATIC MICROACTUATOR; REFLECTION SPECTRUM; RESONANT INTERFERENCE;

DIFFRACTION GRATINGS;

EID: 33646697555     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2193989     Document Type: Article

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