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Volumn 44, Issue 9, 2009, Pages 2276-2287

Role of process type and process conditions on phase content and physical properties of thermal sprayed TiO2 coatings

Author keywords

[No Author keywords available]

Indexed keywords

ANATASE PHASE; ELECTRICAL CONDUCTIVITIES; ELECTRICAL RESPONSE; FEEDSTOCK POWDERS; FUNCTIONAL APPLICATIONS; IN-FLIGHT PARTICLES; INITIAL EXPLORATIONS; MATERIAL PROPERTIES; METASTABLE PHASE; MICRO-STRUCTURAL; MICROSTRUCTURE-PROPERTY RELATIONSHIPS; PARTICLE TEMPERATURES; PHASE CHARACTERIZATIONS; PHASE CONTENTS; PHASE EVOLUTIONS; PHOTO-INDUCED; PROCESS CONDITIONS; PROCESS MAPS; PROCESS PARAMETERS; SPRAY-DEPOSITED; STOICHIOMETRIC CHANGES; THERMAL SPRAY DEPOSITIONS; THERMAL SPRAY PROCESS; THERMAL SPRAYS; VACANCY GENERATIONS; WEAR-RESISTANT COATINGS;

EID: 64949094711     PISSN: 00222461     EISSN: 15734803     Source Type: Journal    
DOI: 10.1007/s10853-008-3044-9     Document Type: Conference Paper
Times cited : (25)

References (46)
  • 22
    • 84975906468 scopus 로고
    • An investigation of thermally-sprayed aluminum oxide coatings for high-temperature electrostatic chucks (ESCs)
    • Institute of Electrical and Electronics Engineers, Austin, TX, USA
    • Swindeman CJ, Seals RD, Murray WP, Cooper MH, Forbes KR (1995) An investigation of thermally-sprayed aluminum oxide coatings for high-temperature electrostatic chucks (ESCs). In: Semiconductor manufacturing, IEEE/UCS/SEMI international symposium, Institute of Electrical and Electronics Engineers, Austin, TX, USA, 1995
    • (1995) Semiconductor Manufacturing, IEEE/UCS/SEMI International Symposium
    • Swindeman, C.J.1    Seals, R.D.2    Murray, W.P.3    Cooper, M.H.4    Forbes, K.R.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.