Formation of silicon nanoparticles using SiH 4 pyrolysis at atmospheric- and low-pressure

Journal of the Korean Physical Society

Volumn 54, Issue 3, 2009, Pages 1021-1026

  Kim, Kwangsu ^a   Woo, Daekwang ^b   Park, Jin Hwan ^c   Doo, Seok Gwang ^c   Kim, Taesung ^a  

^a Sungkyunkwan University   (South Korea)

^b Sungkyunkwan University   (South Korea)

^c Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Coagulation; Oxidation; Scanning mobility particle sizer (SMPS); Si nanoparticles; SiH 4 pyrolysis

Indexed keywords

EID: 64549151076     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.54.1021     Document Type: Article

References (9)

1. A. P. Alivisatos, Science 271, 933 (1996).
2. Z. Zhang, M. Zhao and Q. Jiang, Semicond. Sci. Technol. 16, L33 (2001).
3. W. W. Gerberich, W. M. Mook, C. R. Perrey, C. B. Carter, M. I. Baskes, R. Mukherjee, A. Gidwani, J. Heberlein, P. H. McMurry and S. L. Girshick, J. Mech. Phys. Solids. 51, 979 (2003).
4. M. L. Ostraat, J. W. De Blauwe, M. L. Green, L. D. Bell, M. L. Brongersma, J. Casperson, R. C. Flagan and H. A.Atwater, Appl. Phy. Lett. 79, 433 (2001).
5. M. L. Ostraat, J. W. De Blauwe, M. L. Green, L. D. Bell, H. A. Atwater and R. C. Flagan, J. Electrochem. Soc. 148, G265 (2001).
6. T. Zhang, J. Gao, L. J. Fu, L. C Yang, Y. P. Wu and H. Q. Wu, J. Mat. Chem. 17, 1321 (2007).
7. T. Kim, J. B. Choi and Y. Kim, J. Korean Phys. Soc. 51, 1187 (2007).
8. W. C Hinds, Aerosol Technology-Properties, Behavior and Measurement of Airbone Particles (Wiley, New York, 1999).
9. J. H. Park, D. H. Yoo, C. S. Kim, H. S. Yang, B. K. Moon, G. J. Jung, E. D. Jeong and K. S. Hong, J. Korean Phys. Soc. 49, S680 (2006).