Nanostructure fabrication on an Al surface by chemical and electrochemical multiprocess and nanoscale molecular patterning on the nanostructured Al surface

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 2, 2009, Pages 874-881

  Watanabe, Y ^a   Kato, H ^a   Takemura, S ^a   Kusama, S ^a   Iimura, G ^a   Sugiyama, T ^a   Hiramatsu, T ^a   Nanba, N ^a   Nishikawa, O ^b   Taniguchi, M ^b  

^a KANTO GAKUIN UNIVERSITY   (Japan)

^b KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANILINE MONOMERS; ANODIZATION; CHEMICAL AGENTS; COPPER PHTHALOCYANINES; DYNAMIC FORCE MICROSCOPIES; FABRICATION PROCESS; LINE STRUCTURES; MOLECULAR PATTERNING; MULTI-STAGE PROCESS; MULTI-STAGE PROCESSING; NANO-SCALE; NANO-SCALE PATTERNS; NANO-STRUCTURE FABRICATIONS; NANO-STRUCTURED; POLYANILINE FIBERS; POLYMER PATTERNS; SAW-TOOTH STRUCTURES; STEP STRUCTURES; TOLUENE DROPLETS; ULTRASONIC AGITATIONS;

ACETONE; ALUMINUM; FABRICATION; NANOSTRUCTURED MATERIALS; POLYANILINE; TOLUENE;

NANOSTRUCTURES;

EID: 64549125232     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3098495     Document Type: Article

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