Novel Si-based nanowire devices: Will they serve ultimate MOSFETs scaling or ultimate hybrid integration?

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2008, Pages

  Ernst, T ^a   Duraffourg, L ^a   Dupre C ^a   Bernard, E ^a   Andreucci, P ^a   Becu S ^a   Oilier, E ^a   Hubert, A ^a   Halte C ^a   Buckley, J ^a   Thomas, O ^a   Delapierre, G ^a   Deleonibus, S ^a   De Salvo, B ^a   Robert, P ^a   Faynot, O ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 64549095883     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2008.4796804     Document Type: Conference Paper

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