Microcrystalline silicon solar cells made using rf, mvhf, and microwave at various deposition rates

Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion

Volumn C, Issue , 2003, Pages 2773-2778

  Yan, Baojie ^a   Yue, Guozhen ^a   Yang, Jeffrey ^a   Lord, Kenneth ^a   Banerjee, Arindam ^a   Guha, Subhendu ^a  

^a United Solar Systems Corp   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DOUBLE-JUNCTION STRUCTURES; MICROWAVE FREQUENCIES; RADIO FREQUENCY (RF) GLOW DISCHARGE;

CRYSTALLINE MATERIALS; DEPOSITION; GLOW DISCHARGES; HIGH PRESSURE EFFECTS; MICROWAVES; OPTIMIZATION; POLYSILICON; SEMICONDUCTOR JUNCTIONS;

SILICON SOLAR CELLS;

EID: 6444238117     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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