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Volumn A, Issue , 2003, Pages 118-121
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Topography correlation - A powerful tool applied to the visualisation of remote plasma hydrogen passivation effects
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Author keywords
[No Author keywords available]
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Indexed keywords
CARRIER DIFFUSION COEFFICIENT;
DISLOCATION CLUSTERS;
MICROWAVE INDUCED REMOTE PLASMA HYDROGEN PASSIVATION (MIRHP);
TOPOGRAPHY CORRELATION;
CARRIER CONCENTRATION;
COMPUTER SIMULATION;
DISLOCATIONS (CRYSTALS);
GRAIN BOUNDARIES;
HYDROGEN;
MATHEMATICAL TRANSFORMATIONS;
PASSIVATION;
PLASMA APPLICATIONS;
PROBLEM SOLVING;
SILICON WAFERS;
SOLAR CELLS;
VISUALIZATION;
SURFACE TOPOGRAPHY;
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EID: 6444221592
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (3)
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References (6)
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