Ellipsometric analysis of porous anodized aluminum oxide films

Thin Solid Films

Volumn 517, Issue 13, 2009, Pages 3726-3730

  Jung, Y W ^a   Byun, J S ^a   Woo, D H ^b   Kim, Y D ^a  

^a Kyung Hee University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

Anisotropy; Anodized aluminum oxide; Ellipsometry; Optical properties

Indexed keywords

ANISOTROPIC MODELS; ANODIZATION; ANODIZED ALUMINUM OXIDE; CHEMICAL ETCHINGS; COMPLEX STRUCTURES; EFFECTIVE MEDIUM APPROXIMATION MODELS; ELLIPSOMETRIC ANALYSIS; FLAT-BOTTOM STRUCTURES; INTERFERENCE OSCILLATIONS; SI SUBSTRATES; VISIBLE SPECTRAL RANGES;

ALUMINA; ALUMINUM; ANISOTROPY; ELLIPSOMETRY; MODEL STRUCTURES; OPTICAL PROPERTIES; OXIDE FILMS;

OPTICAL FILMS;

EID: 64349123128     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.12.051     Document Type: Article

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