Optimizing the performance of electrostatic comb-drive actuators using neural networks

Proceedings - International Conference on MEMS, NANO and Smart Systems, ICMENS 2003

Volumn , Issue , 2003, Pages 62-68

  Ahmed, H ^a   Moussa, W A ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Air gaps; Conductors; Design optimization; Electrostatic actuators; Finite element methods; Microelectromechanical systems; Micromechanical devices; Neural networks; Parametric study; Voltage

Indexed keywords

ACTUATORS; ASPECT RATIO; BOUNDARY ELEMENT METHOD; CALIBRATION; COMPLEX NETWORKS; ELECTRIC CONDUCTORS; ELECTRIC POTENTIAL; ELECTROMECHANICAL DEVICES; ELECTROSTATIC ACTUATORS; ELECTROSTATIC DEVICES; ELECTROSTATIC FORCE; ELECTROSTATICS; MEMS; MICROELECTROMECHANICAL DEVICES; NEURAL NETWORKS; PARAMETRIC DEVICES;

AIR-GAPS; BOUNDARY ELEMENT TECHNIQUES; DESIGN OPTIMIZATION; ELECTROSTATIC COMB DRIVES; FEEDFORWARD BACKPROPAGATION NEURAL NETWORKS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICROMECHANICAL DEVICE; PARAMETRIC STUDY;

FINITE ELEMENT METHOD;

EID: 64149109770     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2003.1221966     Document Type: Conference Paper

References (10)

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