An improved meshing technique and its application in the analysis of large and complex MEMS systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3224, Issue , 1997, Pages 238-244

  He, Yie ^a   Marchetti, James ^a   Maseeh, Fariborz ^a  

^a IntelliSense Corporation   (United States)

Author keywords

CAD; Coupled analysis; Efficient simulation; Exposed face mesh; Refinement

Indexed keywords

CAD; COUPLED ANALYSIS; EFFICIENT SIMULATION; EXPOSED FACE MESH; REFINEMENT;

COMPUTER SOFTWARE; ELECTRIC FIELDS; ELECTROSTATICS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DEVICES; THREE DIMENSIONAL;

REFINING;

EID: 0142257934     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284521     Document Type: Conference Paper

References (2)

1. X. Cai, P. Osterberg, H. Yie, J. Gilbert, S. Senturia, J. White, "Self Consistent Electromechanical Analysis of Complex 3-D Microelectromechanical Structures Using Relaxation / Multipole-Accelerated Method," Sensors & Materials, Vol. 2, No. 2, 1994.
2. S. Akkaraju, Y. He, R. Harris, G. Napadensky, F. Maseeh, "Completely Integrated Thermo-electromechanical Analysis of MEMS Devices," Late News Digest for Solid State Sensors and Actuators Workshop, Hilton Head, SC, June 5, 1996.