Morphologies and growth mechanisms of zirconium carbide films by chemical vapor deposition

Journal of Coatings Technology and Research

Volumn 6, Issue 2, 2009, Pages 269-273

  Liu, Qiaomu ^a   Zhang, Litong ^a   Cheng, Laifei ^a   Wang, Yiguang ^a  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

Author keywords

Chemical vapor deposition; Growth mechanism; Surface morphology; Zirconium carbide

Indexed keywords

ACTIVATION ENERGY; CARBIDES; CARBON; CARBON FILMS; CHEMICAL VAPOR DEPOSITION; FILM GROWTH; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; SURFACE MORPHOLOGY;

CARBON DEPOSITION; CONTROLLED PROCESS; EFFECT OF TEMPERATURE; GROWTH MECHANISMS; SURFACE PROCESS; ZIRCONIUM CARBIDE; ZIRCONIUM CARBIDE FILMS; ZIRCONIUM TETRACHLORIDE;

ZIRCONIUM COMPOUNDS;

EID: 63949084822     PISSN: 15470091     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11998-008-9117-5     Document Type: Article

References (23)

1. F Charollais S Fonquernie C Perrais M Perez O Dugne F Cellier G Harbonnier M Vitali 2006 CEA and AREVA R&D on HTR Fuel Fabrication and Presentation of the CAPRI Experimental Manufacturing Line Nucl. Eng. Des. 236 534 542
2. GH Reynolds 1974 Chemical Vapor Deposition of ZrC on Pyrocarbon-Coated Fuel Particles J. Nucl. Mater. 50 215 216
3. Toth LE, Transition Metal Carbides and Nitrides, Academic Press, New York, (1971)
4. Pierson HO, Handbook of Chemical Vapor Deposition (CVD): Principles, Technology, and Applications, William Andrew Publishing, New York, 1992
5. WA Mackie PR Davis 1989 Preparation and Characterization of Zirconium Carbide Field Emitters IEEE Trans. Electron Dev. 36 220 224
6. TB Xie WA Mackie PR Davis 1996 Field Emission from ZrC Films on Si and Mo Single Emitters and Emitter Arrays J. Vac. Technol. B14 2090 2092
7. QM Zhang JJ He WJ Liu M Zhong 2003 Microstructure Characteristics of ZrC-Reinforced Composite Coating Produced by Laser Cladding Surf. Coat. Technol. 162 140 146
8. L D'Alessio A Santagata R Teghil M Zaccagnino I Zaccardo V Marotta D Ferro G De Maria 2000 Zirconium Carbide Thin Films Deposited by Pulsed Laser Ablation Appl. Surf. Sci. 168 284 287
9. CS Chen CP Liu CYA Tsao 2005 Influence of Growth Temperature on Microstructure and Mechanical Properties of Nanocrystalline Zirconium Carbide Films Thin Solid Films 479 130 136
10. Glass, JA, Palmisiano, N, Welsh, RE, "The Chemical Vapor Deposition of Zirconium Carbide onto Ceramic Substrates." In: Properties and Processing of Vapor-Deposited Coatings, Symposium, Boston, MA, 30 November-2 December 1988, pp. 185-190 (1999)
11. Imprescia, RJ, Levinson, LS, Reiswig, RD, Wdace, TC, Williams, JM, "Carbide Coated Fibers on Graphite-Aluminum Composites." In: NASA CR-2533, August 1975, p. 17
12. 6 Nucl. Tech. 35 527 535
13. VG Samoilenko LN Pereselentseva 1975 Deposition of Zirconium Carbide Coating Acting as Diffusion Barriers in Composites Consisting of a Metallic Matrix and Refractory Metal Fibres Powder Metall. Metal Ceram. 14 725 728
14. T Ogawa K Ikawa K Iwamoto 1981 Chemical Vapor Deposition of ZrC within a Spouted Bed by Bromide Process J. Nucl. Mater. 97 104 112
15. T Ogawa K Ikawa K Iwamoto 1979 Effect of Gas Composition on the Deposition of ZrC-C Mixtures: The Bromide Process J. Mater. Sci. 14 125 132
16. K Ikawa 1972 Vapor Deposition of Zirconium Carbide-Carbon Composites by the Iodide Process J. Less-Common Metals 27 325 327
17. P Wagner LA Wahman RW White CM Hollabaugh RD Reiswig 1976 Factors Influencing the Chemical Vapor Deposition of ZrC J. Nucl. Mater. 62 221 228
18. 2 Gaseous Mixture J. Electrochem. Soc. 132 704 706
19. VF Funke AI Tyutyunnikov VS Makeev AN Pilyugin VA Shevchenko 1976 Deposition of Niobium and Zirconium Carbides with Vapor-Gas Phase Circulation in a Closed Circuit Powder Metall. Metal Ceram. 15 452 455
20. Pattanaik, AK, Sarin, VK, "Basic Principles of CVD Thermodynamics and Kinetics." In: Park, JH (ed.) Chemical Vapor Deposition, Surf. Engng. Ser., vol. 2, p. 23. ASM International, Materials Park (2001)
21. M Brüggert Z Hu KJ Hüttinger 1999 Chemistry and Kinetics of Chemical Vapor Deposition of Pyrocarbon VI. Influence of Temperature Using Methane as a Carbon Source Carbon 37 2021 2030
22. RO Grisdale 1953 The Formation of Black Carbon J. Appl. Phys. 24 1082 1084
23. HO Pierson ML Lieberman 1975 The Chemical Vapor Deposition of Carbon on Carbon Fibers Carbon 13 159 166