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Journal of Applied Physics

Volumn 105, Issue 6, 2009, Pages

Analysis of surface roughness of optical elements planarized by nonadiabatic optical near-field etching

(6) Naruse, Makoto a,b Yatsui, Takashi b Nomura, Wataru b Hirata, Kazuya c Tabata, Yoshinori c Ohtsu, Motoichi b

a NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY (Japan)

b UNIVERSITY OF TOKYO (Japan)

c Sigma Koki Co Ltd (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BEFORE AND AFTER; MECHANICAL CONTACTS; NEAR FIELDS; NON-ADIABATIC; NUMERICAL SIMULATIONS; OPTICAL ELEMENTS; OPTICAL NEAR FIELDS; PLANARIZATION; ROUGHNESS MEASURES; SURFACE PROFILES;

ETCHING; METAL ANALYSIS; OPTICAL DEVICES; PHOTOCHEMICAL REACTIONS; POLISHING; POWER SPECTRUM; SURFACE PROPERTIES; SURFACE REACTIONS; SURFACE ROUGHNESS;

SURFACE ANALYSIS;

EID: 63749091820 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3095467 Document Type: Article

Times cited : (8)

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