Mask design and fabrication of LiSFET for light sensor application

2008 International Conference on Electronic Design, ICED 2008

Volumn , Issue , 2008, Pages

  Hashim, Uda ^b   Rahman, Kasim Abdul ^a   Abdullah, Amir Razif Arief Jamil ^a  

^a UNIVERSITY MALAYSIA PERLIS   (Malaysia)

^b Universiti Malaysia Perlis ^*

Author keywords

[No Author keywords available]

Indexed keywords

EXPOSURE SYSTEMS; INTEGRATED CIRCUIT FABRICATIONS; LIGHT SENSORS; LITHOGRAPHY PROCESS; MASK DESIGNS; MOS FETS; OPTICAL LITHOGRAPHIES; PHOTOCONDUCTIVE MATERIALS;

IMAGE QUALITY; INTEGRATED CIRCUITS; LIGHT; LIGHT SOURCES; MOSFET DEVICES; OPTOELECTRONIC DEVICES; PHOTOLITHOGRAPHY; SENSORS; SILICON WAFERS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 63649140117     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICED.2008.4786651     Document Type: Conference Paper

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