Batch encapsulation technique for CMOS based chemical sensors

2008 IEEE-BIOCAS Biomedical Circuits and Systems Conference, BIOCAS 2008

Volumn , Issue , 2008, Pages 321-324

  Prodromakis, T ^a   Georgiou, P ^a   Constandinou, T G ^a   Michelakis, K ^a   Toumazou, C ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

Chemical sensor; CMOS; Encapsulation; ISFET; SU 8 photoresist

Indexed keywords

PHOTORESISTORS; PHOTORESISTS; SURFACE TREATMENT;

CMOS; ENCAPSULANT; ISFET; SENSING MEMBRANES; SINGLE STEPS; SU-8 PHOTORESIST;

CHEMICAL SENSORS;

EID: 63649083088     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/BIOCAS.2008.4696939     Document Type: Conference Paper

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