CMOS ISFET-based structures for biomedical applications

1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings

Volumn , Issue , 2000, Pages 502-506

  Palan, B ^a,b   Roubik, K ^a   Husak M ^a   Courtois, B ^b  

^a CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

^b TIMA LABORATORY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BIOSENSORS; CMOS INTEGRATED CIRCUITS; MEDICAL APPLICATIONS;

BIOMEDICAL APPLICATIONS; BIOMEDICAL MICROSYSTEMS; BIOMEDICAL SENSORS; CHEMICAL MICROSENSORS; EXPERIMENTAL EVALUATION; FABRICATED STRUCTURES; FULLY INTEGRATED; STANDARD CMOS TECHNOLOGY;

DIAGNOSIS;

EID: 84952666767     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MMB.2000.893835     Document Type: Conference Paper

References (9)

1. C. Cane, A. Götz, A. Merlos, I. Garcia, A. Errachid, P. Losantos, E. Lora-Tamayo, "Multilayer ISFET membranes for microsystems applications," Sensors and Actuators B, 35-36, pp. 136-140, 1996.
2. P. Bergveld, "Development of an ion-sensitive solid-state device for neurophysiological measurements," IEEE Trans. On Biomedical Engineering, 17, pp.70-71, 1970.
3. T. Matsuo and M. Esashi, "Methods of ISFET fabrication," Sensors and Actuators, 1, pp. 77-96, 1981.
4. 3 gate ISFETs, "Sensors and Actuators B, 2, pp. 103-110, 1990,
5. 5 gate ISFETs, "Sensors and Actuators B, pp.367-370, 1992.
6. L. Bousse, J. Shott, J.D. Meindl, "A process for the combined fabrication of ion sensors and CMOS circuits," IEEE Electron Device Letters, 9, 1, pp.44-46, 1988.
7. th Ira. Conf, Solid State Sensors and Actuators (Transducers 91), San Francisco, CA, USA, pp. 225-228,1991,
8. T.C.W. Yeow, M.R, Haskard, D.E. Mulcahy et al., "A very large integrated pH-ISFET sensor array chip compatible with standard CMOS processes," Sensors and Actuators B, 44, pp. 434-440, 1997.
9. J. Bausells, J. Carrabina, A. Errachid, A. Merlos, "Ion-sensitive transistors fabricated in a commercial CMOS technology," Eurosensors XII Conf. proceedings, 13-16 September, Southampton, pp.167-170, 1998.