Mixed-level model for highly perforated torsional actuators coupling the mechanical, the electrostatic and the fluidic domain

2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Volumn 1, Issue , 2003, Pages 284-287

  Sattler, Robert ^a   Schrag, Gabriele ^a   Wachutka, Gerhard ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

Electrostatic actuation; Mixed level modeling; Reduced order modeling; Squeeze film damping

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; DAMPING; ELECTRODES; ELECTROSTATICS; FLUIDICS; OPTIMIZATION;

ELECTROSTATIC ACTUATION; MIXED-LEVEL MODELING; REDUCED ORDER MODELING; SQUEEZE-FILM DAMPING;

ACTUATORS;

EID: 6344263853     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. G. Schrag, R. Sattler, G. Wachutka, "System Level Model of Damping Effects for Highly Perforated Torsional Microstructures", Proc. of SISPAD 2002, September 4-6, 2002, Kobe, Japan, pp. 111-114.
2. G. Schrag, G. Wachutka, "Physically based modeling of squeeze film damping by mixed-level system simulation", Sensors and Actuators A 97-98 (2002) pp. 193-200.
3. R. Sattler, F. Plötz, G. Fattinger, G. Wachutka, "Modeling of an Electrostatic Torsional Actuator: Demonstrated with an RF MEMS switch", Sensors and Actuators A 97-98 (2002) pp. 337-346.