Challenges in CMOS-MEMS extraction

2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Volumn , Issue , 2001, Pages 108-111

  Baidya, Bikram ^a   Mukherjee, Tamal ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Canonical representation; CMOS micromachining; Extraction; Integrated MEMS; Layout verification; Parasitics

Indexed keywords

ALGORITHMS; CAPACITANCE; CMOS INTEGRATED CIRCUITS; COMPUTATIONAL COMPLEXITY; EXTRACTION; HIERARCHICAL SYSTEMS; MICROELECTROMECHANICAL DEVICES; POLYSILICON;

CANONICAL REPRESENTATION; CMOS MICROMACHINING; ETCH HOLE DENSITY; INTEGRATED MEMS; LAYOUT FABRICATION; PARASITICS;

MICROMACHINING;

EID: 6344249475     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. G.K. Fedder et al, "Laminated high-aspect-ratio microstructures in a conventional CMOS process," Sensors and Actuators, v. A57, no. 2, pp. 103-110.
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3. B. Baidya et al, "Feature-Recognition for MEMS Extraction," CDROM Proc. 1998 ASME DETC, Atlanta, GA, Sept. 13-16, 1998.
4. B. Baidya et al, "MEMS Component Extraction," Proc. MSM '99, San Juan, Puerto Rico, Apr. 19-21, 1999,pp. 143-6.
5. T.G. Szymanski, C.J.V. Wyk, "Space Efficient Algorithms for VLSI Artwork Analysis," ACM IEEE 20th DAC Proc., Miami Beach, FL, USA, 27-29 June 1983, pp. 734-9.
6. H. Luo et al, "A 1mG Lateral CMOS-MEMS Accelerometer," Proc. MEMS 2000, Miyazaki, Japan, Jan. 23-27, 2000, pp. 502-7.
7. H. Luo et al, "An Elastically Gimbaled Z-Axis CMOS-MEMS Gyroscope," CDROM proc. International Symposium on Smart Structures and Microsystems 2000, Hong Kong, China, Oct. 19-21, 2000.