MEMS fabrication modeling with ChISELS: A massively parallel 3D level-set based feature scale modeler

2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Volumn 3, Issue , 2003, Pages 231-234

  Mussen, Lawrence C ^a   Plimpton, Steven J ^a   Schmidt, Rodney C ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

CVD; Feature scale; Level set method; MEMS

Indexed keywords

FEATURE SCALE; LEVEL-SET METHOD; MEMS;

CHEMICAL REACTORS; CHEMICAL VAPOR DEPOSITION; CODES (SYMBOLS); MICROMACHINING; PRESSURE EFFECTS; SILANES;

MICROELECTROMECHANICAL DEVICES;

EID: 6344237437     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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