|
Volumn A, Issue , 2003, Pages 87-90
|
Temperature- and injection-dependent lifetime spectroscopy of copper-related defects in silicon
a a b b b |
Author keywords
[No Author keywords available]
|
Indexed keywords
ANNEALING TEMPERATURE;
SHOCKLEY-READ-HALL MODEL;
SURFACE RECOMBINATION;
ANNEALING;
CARRIER CONCENTRATION;
COPPER;
DEEP LEVEL TRANSIENT SPECTROSCOPY;
FERMI LEVEL;
ION IMPLANTATION;
PRECIPITATION (CHEMICAL);
SINGLE CRYSTALS;
SILICON;
|
EID: 6344231751
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (7)
|
References (7)
|