Voxel-based heterogeneous geometric modeling for surface micromachined MEMS

2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Volumn , Issue , 2001, Pages 136-139

  Perrin, Andy ^a   Ananthakrishnan, Venkat ^b   Gao, Feng ^b   Sarma, Radha ^b   Ananthasuresh, G K ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

^b UNIVERSITY OF TOLEDO   (United States)

Author keywords

Feature based modeling; Geometric modeling; Heterogeneous modeling; Mask generation; MEMS

Indexed keywords

FEATURE-BASED MODELING; GEOMETRIC MODELING; HETEROGENEOUS MODELING; MASK GENERATION;

ANISOTROPY; COMPUTER SIMULATION; DOPING (ADDITIVES); INVERSE PROBLEMS; MASKS; MATHEMATICAL OPERATORS; MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 6344230208     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. IntelliSuite, Intellisense, Inc., www.intellisense.com
2. MEMCAD, Microcosm Technoogies, Inc., www.memcad.com
3. MEMSCAP, Memscap, www.memscap.com
4. MEMS-Pro, Tanner esearch, wwwtanner.com
5. Ma, L. and Antonsson, E., "Automated Mask-Layout and Prcoess Synthesis for MEMS," MSM 2000, San Diego, March 27-29, pp. 20-23.
6. Hasanuzzaman, M. and Mastrangelo, C.H., 1996, "Process Compilation of Thin Film Microdevices," IEEE Transactions on Computer Aided Design of Integrated Circuits and Systems.
7. Venkataraman, V., Sarma, R., and Ananthasuresh, G.K., 2000, "Part To Art: Basis for a Systematic Geometric Design Tool for Surface Micromachined MEMS," CD-ROM proceedings of the 2000 ASME Design Engineering and Technical Conferences, Baltimore, Maryland, September 10-13, 2000. Paper number 14251.
8. Lieberman, H., 1978, "How to Color in a Coloring Book," SIGGRAPH 78, ACM, Atlanta, GA, August, 1978, pp. 111-116.