Simulation and realization of free space optical switch architecture based on MEMS vertical mirrors

2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Volumn , Issue , 2002, Pages 226-229

  Wang, W J ^a   Lin, R M ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Finite element method; Free space; Gaussian beam optics; MEMS; Optical switch architecture

Indexed keywords

FREE-SPACE; GAUSSIAN BEAM OPTICS; OPTICAL BEAMS; OPTICAL SWITCH ARCHITECTURE;

COMPUTER SIMULATION; ELECTRON BEAMS; ELECTROSTATICS; EVAPORATION; FINITE ELEMENT METHOD; HYDROFLUORIC ACID; LIGHT PROPAGATION; OPTICAL FIBERS; OPTICAL SWITCHES; PHOTOLITHOGRAPHY; SURFACE ROUGHNESS;

MICROELECTROMECHANICAL DEVICES;

EID: 6344226872     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

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3. S. Kurth, R. Hahn, C. Kaufmann, K. Kehr, J. Mehner, U. Wollmann, W. Dotzel, and T. Gessner, "Silicon mirrors and micromirror arrays for spatial laser beam modulation," Sensors & Actuators A (Physical), A66, 1-3, 76-82, 1998.
4. B.E.A Saleh and M.C. Teich, Fundamentals of Photonics, John Wiley & Sons, 1991.