Very large scale integration of MOEMS mirrors, MEMS angular amplifiers and high-voltage, high-density IC electronics for photonic switching

2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Volumn 1, Issue , 2003, Pages 300-303

  Bryzek, Janusz ^a   Nasiri, Steven ^a   Flannery, Anthony ^a   Kwon, Haesung ^a   Novack, Mitch ^a   Marx, David ^a   Sigari, Elaheh ^a   Chen, Eddy ^a   Garate, Jaime ^a  

^a Transparent Networks   (United States)

Author keywords

MEMS; Mirror; MOEMS; Optical; Photonic switching; Telecom

Indexed keywords

MEMS; MOEMS; OPTICAL MIRRORS; PHOTONIC SWITCHING; TELECOM;

AMPLIFICATION; AMPLIFIERS (ELECTRONIC); BANDWIDTH; CMOS INTEGRATED CIRCUITS; ELECTRIC SWITCHES; INTEGRATED CIRCUITS; MIRRORS; NETWORK PROTOCOLS; PHOTONS; SWITCHING;

MICROELECTROMECHANICAL DEVICES;

EID: 6344223225     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Nasiri, S., "Microelectromechanical mirror and mirror array", U.S. Patent No. 6,480,320. November 12, 2002.
2. Dewa, A. S., Orcutt, J. W., "Development of a silicon two-axis micromirror for an optical cross-connect", Solid-State Sensor and Actuator Workshop, Hilton Head, SC, June 4-8, 2000, pp. 93-96
3. Aksyuk, V. A., Pardo, C. A., Bolle, S. A., Giles, C. R., Bishop, D. J., "Lucent Microstar
4. micromirrror array technology for large optical crossconnects", Proceedings of the SPIE - The International Society for Optical Engineering, 2000, vol. 4178, pp. 320-324.
5. Nee, J.T., Conant, R. A., Muller, R. S., Lau, K.Y., "Lightweight, optically flat micromirrors for fast beam steering", Conference: 2000 IEEE/LEOS International Conference on Optical MEMS, 21-24 Aug. 2000. Kauai, HI, USA, pp. 9-10.
6. Li, J., Zhang, Q.X., Balasubramanian, N., Huang, J. M., Liu, A.Q., "Integrated add/drop multiplexer (ADM) using micromachined mirror", Proceedings of the SPIE - The International Society for Optical Engineering, 2001. vol. 4582, pp. 87-94.
7. Matsui, K.; Shimoto, T.; Shimada, Y.; Utsumi, K.,"MCM-D/L technology based on Cu/benzocyclobuten thin film multilayer structure", Proceedings of the SPIE - The International Society for Optical Engineering, 1995, vol.2649, p.396-401.
8. Im, J., et. al., "On the mechanical reliability of photo-BCB-based thin film dielectric polymer for electronic packaging applications", Trans. of ASME, vol. 122, March, 2000, pp. 28-33.