Surface micromachined viscous spiral pump

2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Volumn 1, Issue , 2003, Pages 210-213

  Kilani, M I ^a   Galambos, P C ^b   Haik, Y ^c   Chen, C J ^c  

^a UNIVERSITY OF JORDAN   (Jordan)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c FLORIDA STATE UNIVERSITY   (United States)

Author keywords

Micropump; Spiral; Surface micromachining; Viscous

Indexed keywords

MICROPUMP; SPIRAL PUMP; SPIRAL VISCOUS; SURFACE MICROMACHINING;

COMPUTER SIMULATION; DISKS (STRUCTURAL COMPONENTS); DRAG; LUBRICATION; REYNOLDS NUMBER; ROTATION; VISCOSITY;

MICROMACHINING;

EID: 6344219791     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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