Engineering substrates for 3d integration of iii-v and CMOS

ECS Transactions

Volumn 16, Issue 8, 2009, Pages 227-234

  Herrick, K J ^a   Kazior, T E ^a   Laroche, J ^a   Liu, A W K ^b   Lubyshev, D ^b   Fastenau, J M ^b   Urteaga, M ^c   Ha, W ^c   Bergman, J ^c   Brar, B ^c   Bulsara, M T ^d   Fitzgerald, E A ^d   Clark, D ^a   Smith, D ^a   Thompson, R F ^a   Daval, N ^e   Celler, G K ^e  

^a RAYTHEON COMPANY   (United States)

^b IQE INC   (United States)

^c TELEDYNE SCIENTIFIC COMPANY   (United States)

^d Massachusetts Institute of Technology Cambridge   (United States)

^e NONE

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; CUTOFF FREQUENCY; FIELD EFFECT TRANSISTORS; GERMANIUM COMPOUNDS; III-V SEMICONDUCTORS; INDIUM PHOSPHIDE; SEMICONDUCTING GERMANIUM; SEMICONDUCTING INDIUM PHOSPHIDE; THREE DIMENSIONAL INTEGRATED CIRCUITS; WAFER BONDING;

3-D INTEGRATION; COMPOUND SEMICONDUCTORS; DIRECT GROWTH; GERMANIUMS (GE); MONOLITHIC INTEGRATION; OPTIMAL CIRCUIT; PEAK CURRENTS; TEMPLATE LAYERS;

SILICON WAFERS;

EID: 63149182948     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2982873     Document Type: Conference Paper

References (5)

1. Carlos Mazuré and George K. Celler. "Advanced Electronic Substrates for the Nanotechnology Era", The Electrochemical Society Interface, Winter (2006-07).
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3. C. Maleville and C. Mazure. "Smart Cut™ technology: From 300 mm ultrathin SOI production to advanced engineered substrates." Solid-State Electron. 48 (6) une (2004), 1055-1063.
4. Molecular-beam epitaxy production of large-diameter metamorphic high electron mobility transistor and heterojunction bipolar transistor wafers, by O. Baklenov, D. Lubyshev, Y. Wu, X.-M. Fang, J. M. Fastenau, L. Leung, F. J. Towner, A. B. Cornfeld, and W. K. Liu, published May/June 2002.
5. Monolithic CMOS-compatible AlGalnP visible LED arrays on Silicon on Lattice-Engineered Substrates (SOLES), by Katnesh Chilukuri, Michael J. Mori, Carl L. Dohrmanand, Eugene A. Fitzgerald, published November 2006.