Surface acoustic wave device based wireless passive microvalve for microfluidic applications

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 6799, Issue , 2008, Pages

  Dissanayake, Don W ^a   Al Sarawi, Said F ^a   Abbott, Derek ^a  

^a UNIVERSITY OF ADELAIDE   (Australia)

Author keywords

Actuator; ANSYS; Electrostatic; MEMS; Microfluidic; Micropump; Microvalve; Passive; SAW; Wireless

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACTUATORS; COMPUTER SIMULATION; ELECTROSTATICS; MEMS; NEMS;

ANSYS SIMULATION TOOLS; MICROPUMPS; MICROVALVE; PASSIVE MICROVALVES;

MICROFLUIDICS;

EID: 43049151781     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.765011     Document Type: Conference Paper

References (16)

1. C. K. Campbell, Surface Acoustic Wave Devices for Mobile and Wireless Communications, San Diago, Califonia: Academic Press, 1998.
2. J. W. Gardner, V. K. Varadan and O. O. Awadelkarim, Microsensors, MEMS, and Smart Devices, Tsinghua University Press, Beijing, 2001.
3. I. Pitz, L. T. Hall, H. J. Hansen, V. K. Varadan, C. D. Bertram, S. Maddocks, S. Enderling, D. Saint, S. F. Al-Sarawi and D. Abbott, "Trade-offs for Wireless Transcutaneous RF Communication in Biotelemetric Applications," Proc. of SPIE-Biomedical Applications of Micro- and Nanoengineering 4937, pp. 307-318, November 2002.
4. A. Wixforth, "Acoustically driven planar microfluidics," Superlattices and Microstructures 6, pp. 389-396, 2003.
5. C. J. Strobl, Z. V. Guttenberg and A. Wixforth, "A Nano- and pico-dispensing of fluids on planar substrates using SAW," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 51(11), pp. 1432-1436, 2004.
6. V. K. Varadan and V. V. Varadan, "Microsensors, micromechanical systems (MEMS), and electronics for smart structures and systems," Smart Materials and Structures 9, pp. 953-972, 2000.
7. H. Subramanian, V. K. Varadan, V. V. Varadan and M. J. Vellekoopz, "Design and fabrication of wireless remotely readable MEMS based microaccelerometers," Smart Materials and Structures 6(6), pp. 730-738, 1997.
8. L. B. Milstein and P. Das, "Surface Acoustic Wave Devices," IEEE Communications Magazine 17, pp. 25-33, 1979.
9. D. W. Dissanayake, S. Al-Sarawi and D. Abbott, "Surface Acoustic Wave Device Based Electrostatic Actuator for Microfluidic Applications," 2nd International Conference on Sensing Technology , pp. 381-386, November 2007.
10. A. S. Sezen, S. Sivaramakrishnan, S. Hur, R. Rajamani, W. Robbins and B. J. Nelson, "Passive Wireless MEMS Microphones for Biomedical Applications," Journal of Biomedical Engineering 127, pp. 1030-1034, 2005.
11. A. C. Tikka, S. Al-Sarawi, D. Abbott, M. S. K. Wong and J. D. Schutz, "Improving the Security and Actuation of Wireless Controlled Microvalve," Proc. of SPIE-Smart Structures, Devices, and Systems III 6414, January 2007.
12. A. C. Tikka, S. Al-Sarawi and D. Abbott, "SAW parameter extraction using Finite Element Analysis," 2nd International Conference on Sensing Technology, pp. 393-398, November 2007.
13. D. W. Dissanayake, A. C. Tikka, S. Al-Sarawi and D. Abbott, "Radio frequency controlled microvalve for biomedical applications," Proc. of SPIE-Smart Materials IV 6413, 2007.
14. R. Duggirala, S. Son and A. Lal, "A Pyroelectric-Piezoelectric Valve for Integrated Microfluidics," Proc. of IEEE International Solid-State Sensors and Actuators 2, pp. 1554-1557.
15. N. T. Nguyen, X. Huang and T. K. Chuan, "MEMS-Micropumps: A Review," Transactions of the ASME Journal of Fluids Engineering 124, pp. 384-392, June 2002.
16. ANSYS Incorporation, "Home page." visited on 21/11/2007.