Focus-based depth estimation in the SEM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7266, Issue , 2008, Pages

  Dahmen, C ^a  

^a UNIVERSITY OF OLDENBURG   (Germany)

Author keywords

Depth estimation; Depth from focus; Nanohandling; Object tracking

Indexed keywords

2D OBJECTS; DEPTH ESTIMATION; DEPTH FROM FOCUS; DEPTH INFORMATIONS; DEPTH OF FOCUS; NANO MANIPULATIONS; NANOHANDLING; NEW APPROACHES; OBJECT TRACKING; SCANNING ELECTRON MICROSCOPES; SEM; SEM IMAGES; THREE-DIMENSIONAL TRACKING; TWO-DIMENSIONAL (2-D) IMAGE;

IMAGE SENSORS; OBJECT RECOGNITION; SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL;

ESTIMATION;

EID: 62449131421     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.807274     Document Type: Conference Paper

References (9)

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