Atomic layer deposition of SiO2 on porous alumina membranes: Controlling the pore size and transport properties

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7267, Issue , 2008, Pages

  Velleman, Leonora ^a   Triani, Gerry ^b   Evans, Peter J ^b   Atanacio, Armand ^b   Shapter, Joe G ^a   Losic, Dusan ^c  

^a FLINDERS UNIVERSITY   (Australia)

^b AUSTRALIAN NUCLEAR SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

^c UNIVERSITY OF SOUTH AUSTRALIA   (Australia)

Author keywords

Atomic layer deposition; Molecular separation; Porous alumina membrane composite membranes

Indexed keywords

ATOMIC-LAYER DEPOSITIONS; BIO-SENSING; COMMERCIAL SOURCES; DEPOSITION CYCLES; DYNAMIC SECONDARY-ION MASS SPECTROMETRIES; FUNCTIONALISATION; HYDROPHOBIC AND HYDROPHILIC; HYDROPHOBIC PROPERTIES; MODIFIED MEMBRANES; MOLECULAR SEPARATION; NANOPOROUS ALUMINAS; ORGANIC MOLECULES; PORE DIAMETERS; POROUS ALUMINA MEMBRANE COMPOSITE MEMBRANES; SEM; SILANOL; SILICA COATINGS; SPECTRO-PHOTOMETRIC METHODS;

ALUMINA; ATOMIC LAYER DEPOSITION; ATOMS; BIOLOGICAL WATER TREATMENT; CELL CULTURE; CELL MEMBRANES; CHEMICAL REACTORS; CONTROLLED DRUG DELIVERY; DEPOSITION; HIGH PERFORMANCE LIQUID CHROMATOGRAPHY; HYDROPHOBICITY; PORE SIZE; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; SILANES; SILICA; SIZE SEPARATION; SPECTROPHOTOMETERS; SPECTROPHOTOMETRY; SURFACE CHEMISTRY; TRANSPORT PROPERTIES;

COMPOSITE MEMBRANES;

EID: 62449098279     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.810716     Document Type: Conference Paper

References (20)

1. Yamashita, T., et al., Permeation flux of organic molecules through silica-surfactant nanochannels in a porous alumina membrane. Analytical Sciences, 2006. 22(12): p. 1495-1500.
2. Lee, S.W., et al., Transport and functional behaviour of poly(ethylene glycol)-modified nanoporous alumina membranes. Nanotechnology, 2005. 16(8): p. 1335-1340.
3. Losic, D., et al., Surface modification of nanoporous alumina membranes by plasma polymerization. Nanotechnology, 2008. 19(24).
4. Furneaux, R.C., W.R. Rigby, and A.P. Davidson, The formation of controlled-porosity membranes from anodically oxidised aluminium. Nature, 1989. 337(6203): p. 147-149.
5. Berland, B.S., et al., In situ monitoring of atomic layer controlled pore reduction in alumina tubular membranes using sequential surface reactions. Chemistry of Materials, 1998. 10(12): p. 3941-3950.
6. Alsyouri, H.M., et al., Cyclic CVD modification of straight pore alumina membranes. Langmuir, 2003. 19(18): p. 7307-7314.
7. McCleskey, M., Ehler, D.S., Young, J.S., Pesiri, D.R., Jarvinen, G.D., Sauer, N.N. , Asymmetric membranes with modified gold films as selective gates for metal ion separations. Journal of Membrane Science, 2002. 210: p. 273-278.
8. Popat, K.C., et al., Surface modification of nanoporous alumina surfaces with poly(ethylene glycol). Langmuir, 2004. 20(19): p. 8035-8041.
9. Nagale, M., B.Y. Kim, and M.L. Bruening, Ultrathin, hyperbranched poly(acrylic acid) membranes on porous alumina supports. Journal of the American Chemical Society, 2000. 122(47): p. 11670-11678.
10. Vajandar, S.K., et al., SiO2-coated porous anodic alumina membranes for high flow rate electroosmotic pumping. Nanotechnology, 2007. 18(27).
11. Ott, A.W., et al., Modification of porous alumina membranes using Al2O3 atomic layer controlled deposition. Chemistry of Materials, 1997. 9(3): p. 707-714.
12. Chen, P., et al., Atomic layer deposition to fine-tune the surface properties and diameters of fabricated nanopores. Nano Letters, 2004. 4(7): p. 1333-1337.
13. Leskela, M. and M. Ritala, Atomic layer deposition (ALD): from precursors to thin film structures. Thin Solid Films, 2002. 409(1): p. 138-146.
14. Xiong, G., et al., Effect of atomic layer deposition coatings on the surface structure of anodic aluminum oxide membranes. Journal of Physical Chemistry B, 2005. 109(29): p. 14059-14063.
15. Elam, J.W., et al., Atomic layer deposition for the conformal coating of nanoporous materials. Journal of Nanomaterials, 2006.
16. Maier, G., Gas Separation with Polymer Membranes. Angew. Chem. Int. Ed., 1998. 37: p. 2960-2974.
17. Suntola, T. and J. Anston, US Patent 4058430. 1977.
18. Ritala, M., et al., Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources. Science, 2000. 288(5464): p. 319-321.
19. Losic, D., et al., Controlled pore structure modification of diatoms by atomic layer deposition of TiO2. Journal of Materials Chemistry, 2006. 16(41): p. 4029-4034.
20. Velleman, L., et al., Gold nanotube membranes functionalised with fluorinated thiols for selective molecular transport. Journal of Membrane Science, 2008.