Influence of evaporation rate on optical constants of ITO deposited by e-beam evaporation

Gongneng Cailiao/Journal of Functional Materials

Volumn 40, Issue 1, 2009, Pages 56-59

  Li, Tian Lin ^a   Zhu, Yan Xu ^a   Xu, Chen ^a   Gao, Guo ^a   Shen, Guang Di ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

E beam evaporation; Evaporation rate; ITO; Spectroscopic ellipsometry

Indexed keywords

ELECTRODEPOSITION; EVAPORATION; HALL EFFECT; MAGNETIC FIELD EFFECTS; OPTICAL CONSTANTS; RATE CONSTANTS; REFRACTIVE INDEX; SPECTROSCOPIC ELLIPSOMETRY;

ABSORPTION MECHANISMS; ANGLE OF INCIDENCES; APPROPRIATE MODELS; E-BEAM EVAPORATION; ELLIPSOMETRIC PARAMETERS; EVAPORATION RATE; EXPERIMENT DATUM; EXTINCTION CO-EFFICIENT; FITTING RESULTS; ITO; VISIBLE SPECTRUMS;

VAPORS;

EID: 61649105050     PISSN: 10019731     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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