Finite-element modeling of a hexagonal surface acoustic wave device based on NbO3 substrate

IEEE Sensors Journal

Volumn 9, Issue 4, 2009, Pages 329-339

  Sankaranarayanan, Subramanian K R S ^a   Bhethanabotla, Venkat R ^b  

^a HARVARD UNIVERSITY   (United States)

^b UNIVERSITY OF SOUTH FLORIDA   (United States)

Author keywords

Finite elements; Hexagonal surface acoustic wave (SAW); Lithium niobate; Materials characterization; Sensing

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; APPLICATIONS; BIOLOGICAL MATERIALS; CHEMICAL ELEMENTS; CRYSTAL ORIENTATION; ELECTRIC CURRENTS; FINITE ELEMENT METHOD; FLUID DYNAMICS; FREQUENCY RESPONSE; LITHIUM; MODEL STRUCTURES; NIOBIUM COMPOUNDS; PIEZOELECTRIC TRANSDUCERS; SUBSTRATES; THREE DIMENSIONAL; THREE DIMENSIONAL COMPUTER GRAPHICS; ULTRASONIC TRANSDUCERS; WAVE PROPAGATION;

FINITE ELEMENTS; HEXAGONAL SURFACE ACOUSTIC WAVE (SAW); LITHIUM NIOBATE; MATERIALS CHARACTERIZATION; SENSING;

SURFACES;

EID: 61549101846     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2009.2013505     Document Type: Article

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