Combined EBSD/EDS tomography in a dual-beam FIB/FEG-SEM

Journal of Microscopy

Volumn 233, Issue 3, 2009, Pages 442-450

  West, G D ^a   Thomson, R C ^a  

^a LOUGHBOROUGH UNIVERSITY   (United Kingdom)

Author keywords

3D electron backscatter diffraction; 3D energy dispersive spectroscopy; Dual beam; Tomography

Indexed keywords

BACKSCATTERING; ELECTRON DIFFRACTION; ION BEAMS; NICKEL ALLOYS; SCANNING ELECTRON MICROSCOPY; TOMOGRAPHY;

3D ELECTRON; 3D ELECTRON BACKSCATTER DIFFRACTION; 3D ENERGY DISPERSIVE SPECTROSCOPY; DIFFRACTION ENERGY; DUAL-BEAM; ELECTRON BACK SCATTER DIFFRACTION; ELECTRON BACKSCATTER DIFFRACTION; FIELD EMISSION GUN SCANNING ELECTRON MICROSCOPE; FOCUSED IONS BEAMS; SPECTROSCOPY DATA;

ENERGY DISPERSIVE SPECTROSCOPY;

ALLOY; NICKEL;

ARTICLE; ELECTRON BACKSCATTER DIFFRACTION; ELECTRON DIFFRACTION; ENERGY DISPERSIVE SPECTROSCOPY; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; INFORMATION PROCESSING; MICROSCOPE; PRECIPITATION; PRIORITY JOURNAL; SPECTROSCOPY; STEREORADIOGRAPHY;

EID: 61449195740     PISSN: 00222720     EISSN: 13652818     Source Type: Journal    
DOI: 10.1111/j.1365-2818.2009.03138.x     Document Type: Article

References (8)

1. Giannuzzi, L.A. & Stevie, F.A. (Eds. 2005) Introduction to focused ion beams: instrumentation, theory, techniques and practice. Spinger, New York.
2. Groeber, M.A., Haley, B.K., Uchic, M.D., Dimiduk, D.M. & Ghosh, S. (2006) 3D reconstruction and characterization of polycrystalline microstructures using a FIB-SEM system. Mater. Character. 57, 259 273.
3. Möbus, G. & Inkson, B.J. (2007) Nanoscale tomography in materials science. Mater. Today 10 (12 18 25.
4. Nowell, M.M. & Wright, S.I. (2004) Phase differentiation via combined EBSD and XEDS. J. Microsc. 213 (3 296 305.
5. Schaffer, M., Wagner, J., Schaffer, B., Schmied, M. & Mulders, H. (2007) Automated three-dimensional X-ray analysis using a dual-beam FIB. Ultramicroscopy 107, 587 597.
6. Uchic, M.D., Holzer, L., Inkson, B.J., Principe, E.L. & Munroe, P. (2007) Three-dimensional microstructural characterization using focused ion beam tomography. MRS Bull. 32 (5 408 416.
7. Xu, W., Ferry, M., Mateescu, N., Cairney, J.M. & Humphreys, F.J. (2007) Techniques for generating 3-D EBSD microstructures by FIB tomography. Mater. Character. 58, 961 967.
8. Zaefferer, S., Wright, S.I. & Raabe, D. (2008) Three-dimensional orientational microscopy in a focused ion beam-scanning electron microscope: A new dimension of materials characterisation. Metall. Mater. Trans. A39, 374 389.