Mechanisms of microhole formation on glasses by an abrasive slurry jet

Journal of Applied Physics

Volumn 105, Issue 4, 2009, Pages

  Wang, J ^a   Nguyen, T ^a   Pang, K L ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ABRASIVES; FLUID DYNAMICS; GLASS; HIGH PRESSURE EFFECTS; JETS; VISCOSITY; VISCOUS FLOW;

ABRASIVE JETS; ABRASIVE SLURRIES; BRITTLE MATERIALS; CROSS SECTIONS; DIRECT IMPACTS; DUCTILE MODES; EROSION THEORIES; HOLE DEPTHS; HOLE DIAMETERS; MATERIAL REMOVALS; MICRO HOLES; PRECISION PROCESSING; PROCESS PARAMETERS; SILICON SUBSTRATES; THREE ZONES;

EROSION;

EID: 61449193320     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3079802     Document Type: Article

References (19)

1. T. Makimura, S. Mitani, Y. Kenmotsu, K. Murakami, M. Mori, and K. Konda, Appl. Phys. Lett. 0003-6951 10.1063/1.1782265 85, 1274 (2004).
2. E. Bamberg, and S. Heamawatanachai, J. Mater. Process. Technol. 209, 1826 (2009).
3. J. Wang, Abrasive Waterjet Machining of Engineering Materials (Trans Tech Publications, Uetikon-Zuerich, 2003).
4. A. Momber and R. Kovacevic, Principles of Abrasive Waterjet Machining (Springer-Verlag, London, 1998).
5. R. Kovacevic, M. Hashish, R. Mohan, M. Ramulu, T. J. Kim, and E. S. Geskin, ASME J. Manuf. Sci. Eng. 1087-1357 10.1115/1.2836824 119, 776 (1997).
6. O. Fahnle, H. Van Brug, and H. Frankena, Appl. Opt. 0003-6935 10.1364/AO.37.006771 37, 6771 (1998).
7. S. M. Booij, H. van Brug, M. Singh, and J. Braat, Proc. SPIE 4451, 222 (2001). 0277-786X
8. D. S. Miller, J. Mater. Process. Technol. 0924-0136 10.1016/j.jmatprotec. 2004.02.041 149, 37 (2004).
9. T. Nguyen, K. Pang, and J. Wang, Key Eng. Mater. 389-390, 375 (2008). 1013-9826
10. M. J. McCarthy and N. A. Molloy, Chem. Eng. J. 0300-9467 10.1016/S1385-8947(99)00108-4 7, 1 (1974).
11. L. Bayvel and Z. Orzechowski, Liquid atomization, Combustion: An International series (Taylor and Francis, London, 1993).
12. R. H. McLean, Trans. SPE of AIME 23, 1299 (1964).
13. K. Yanaida, Proceedings of the Second International Symposium on Jet Cutting Technology (BHRA Fluid Engineering, Cranfield, Bedford, 1974).
14. S. K. Bhunia and J. V. Lienhard, J. Fluids Eng. 0098-2202 10.1115/1.2910277 116, 338 (1994).
15. H. Wensink and M. C. Elwenspoek, Wear 0043-1648 10.1016/S0043-1648(02) 00223-5 253, 1035 (2002).
16. J. Zeng and T. J. Kim, Wear 0043-1648 10.1016/0043-1648(96)07223-7 199, 275 (1996).
17. J. G. A. Bitter, Wear 0043-1648 10.1016/0043-1648(63)90073-5 6, 169 (1963).
18. J. A. C. Humphrey, Int. J. Heat Fluid Flow 0142-727X 10.1016/0142- 727X(90)90036-B 11, 170 (1990).
19. I. M. Hutchings, Tribology: Friction and Wear of Engineering Materials (Edward Arnold, London, 1992).