Nanometer accurate shaping with Fluid Jet Polishing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4451, Issue , 2001, Pages 222-232

  Booij, Silvia M ^a   Van Brug, Hedser ^a   Singh, Mandeep ^a   Braat, Joseph J M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Abrasive fluid jet; Mask; Nanometer accuracy; Polishing; Shaping

Indexed keywords

EROSION; JETS; MASKS; SURFACE ROUGHNESS; SURFACES;

FLUID JET POLISHING; NANOMETER ACCURACY; SHAPING;

POLISHING;

EID: 0035761735     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.453620     Document Type: Conference Paper

References (6)

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5. http://www.generaloptics.com/
6. Wyko optical testing, operator's guide, manual, edition 1.600, Sharon K. Lippold, Wyko Corporation, East Elvira Road, Tucson, Arizona 85706 (1995)