C2 and CN dynamics and pulsed laser deposition of CNx films

Journal of Applied Physics

Volumn 105, Issue 4, 2009, Pages

  Kushwaha, Archana ^a   Mohanta, Antaryami ^a   Thareja, Raj K ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SPECTROSCOPY; CARBON FILMS; ELECTRODEPOSITION; EMISSION SPECTROSCOPY; LASERS; NITROGEN; PLASMAS; PULSED LASER DEPOSITION; THIN FILMS;

ATOMIC FORCES; CARBON PLASMAS; CNX FILMS; EXPANDING PLASMAS; FRONT VELOCITIES; NITROGEN AMBIENT; OPTICAL EMISSIONS; PEAK POSITIONS; PULSED LASERS; PULSED-LASER DEPOSITION TECHNIQUES; SPECTROSCOPIC MEASUREMENTS; TARGET SURFACES; TIME-RESOLVED; TWO COMPONENTS; X- RAY DIFFRACTIONS;

CARBON NITRIDE;

EID: 61449189799     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3078078     Document Type: Article

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