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IEE Colloquium (Digest)
Volumn , Issue 76, 1997, Pages
Low cost liga processes
Author keywords

[No Author keywords available]
Indexed keywords

EID: 6144260326     PISSN: 09633308     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (3)
References (6)
  • 1
    • 0027607944 scopus 로고
    • Metallic microstructures fabricated using photosensitive polyimide electroplating moulds
    • Frazier AB and Allen MG: "Metallic microstructures fabricated using photosensitive polyimide electroplating moulds", J. Microelectromech. Syst., Vol 2, No 2, 1993, pp 87-94
    • (1993) J. Microelectromech. Syst. , vol.2 , Issue.2 , pp. 87-94
    • Frazier, A.B.1    Allen, M.G.2
  • 2
    • 0010953407 scopus 로고    scopus 로고
    • Optical DUV-lithography for high microstructures
    • Heuberger A and Löchel B: "Optical DUV-lithography for high microstructures", Microsystem Technologies, Vol 3, No 1, 1996, pp 1-6
    • (1996) Microsystem Technologies , vol.3 , Issue.1 , pp. 1-6
    • Heuberger, A.1    Löchel, B.2
  • 3
    • 0000051359 scopus 로고
    • High aspect ratio polyimide etching using an oxygen plasma generated by electron cyclotron resonance source
    • Juan WH and Pang SW: "High aspect ratio polyimide etching using an oxygen plasma generated by electron cyclotron resonance source", J. Vac. Sci. Technol. B, Vol 12, No 1, 1994, pp 422-426
    • (1994) J. Vac. Sci. Technol. B , vol.12 , Issue.1 , pp. 422-426
    • Juan, W.H.1    Pang, S.W.2
  • 4
    • 0029753205 scopus 로고    scopus 로고
    • Laminated dry film resist for microengineering applications
    • Zhu J et al: "Laminated dry film resist for microengineering applications", Microelectronic Eng., Vol 30, 1996, pp 365-368
    • (1996) Microelectronic Eng. , vol.30 , pp. 365-368
    • Zhu, J.1
  • 5
    • 0029252911 scopus 로고
    • Combination of excimer laser micromachining and replication processes suited for large scale production ('Laser-LIGA')
    • Arnold J et al: "Combination of excimer laser micromachining and replication processes suited for large scale production ('Laser-LIGA')", Applied Surface Sci., Vol 86, 1995, pp 251-258
    • (1995) Applied Surface Sci. , vol.86 , pp. 251-258
    • Arnold, J.1
  • 6
    • 0002675013 scopus 로고    scopus 로고
    • The formation of moulds for 3D microstructures using excimer laser ablation
    • Lawes RA, Holmes AS and Goodall FN: "The formation of moulds for 3D microstructures using excimer laser ablation", Microsystem technologies, Vol 3, No 1, 1996, pp 17-19
    • (1996) Microsystem Technologies , vol.3 , Issue.1 , pp. 17-19
    • Lawes, R.A.1    Holmes, A.S.2    Goodall, F.N.3

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.