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Volumn 267, Issue 4, 2009, Pages 652-655
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Molecular dynamics simulations to explore the effect of chemical bonding in the keV bombardment of Si with C60, Ne60 and 12Ne60 projectiles
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Author keywords
C60; MEDF; Molecular dynamics; Silicon
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Indexed keywords
ATOMS;
BOND STRENGTH (CHEMICAL);
DEPTH PROFILING;
KINETIC ENERGY;
MOLECULAR DYNAMICS;
NEON;
PROJECTILES;
SECONDARY ION MASS SPECTROMETRY;
SILICON;
SUBSTRATES;
C ATOMS;
C60;
EFFECT OF CHEMICALS;
ENERGY DEPOSITIONS;
MEDF;
MESO-SCALE;
MOLECULAR DYNAMICS SIMULATIONS;
NORMAL INCIDENCES;
SECONDARY IONS;
SI ATOMS;
VERTICAL DISTRIBUTIONS;
DYNAMICS;
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EID: 61349126456
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nimb.2008.11.055 Document Type: Article |
Times cited : (10)
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References (19)
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