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Volumn 255, Issue 4, 2008, Pages 837-840
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Simulations of C 60 bombardment of Si, SiC, diamond and graphite
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Author keywords
C 60 +; Carbon; Molecular dynamics simulations; Silicon; ToF SIMS
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Indexed keywords
ATOMS;
CARBON;
DIAMONDS;
GRAPHITE;
MOLECULAR DYNAMICS;
PROJECTILES;
SECONDARY ION MASS SPECTROMETRY;
SILICON;
SILICON CARBIDE;
SILICON COMPOUNDS;
SPUTTERING;
C60^+;
ENERGY DEPOSITIONS;
GRAPHITE-LIKE STRUCTURES;
LATTICE STRUCTURES;
MOLECULAR DYNAMICS SIMULATIONS;
SPUTTERING YIELDS;
SUBSTRATE CHARACTERISTICS;
TOF SIMS;
CRYSTAL ATOMIC STRUCTURE;
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EID: 56449128414
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2008.05.236 Document Type: Article |
Times cited : (25)
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References (19)
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