Optimal implementation of a microspectrometer based on a single flat diffraction grating

Applied Optics

Volumn 47, Issue 12, 2008, Pages 2082-2089

  Grabarnik, Semen ^a   Emadi, Arvin ^a   Sokolova, Elena ^b   Vdovin, Gleb ^a   Wolffenbuttel, Reinoud F ^a  

^a Department of Microelectronics   (Netherlands)

^b River Diagnostics BV   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COATINGS; DIFFRACTION; ELECTROMECHANICAL DEVICES; GLASS; MEMS; SPECTRAL RESOLUTION; SPECTROMETERS;

COMPONENT MISMATCH; DESIGN TOOL; GLASS PLATE; GLASS WAFER; MICRO-SPECTROMETER; MODEL CALCULATIONS; OPERATING WAVELENGTH;

DIFFRACTION GRATINGS;

EID: 60949097702     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.47.002082     Document Type: Article

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