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Volumn 25, Issue 1, 2009, Pages 85-89

Metal organic chemical vapour deposited thin films of cobalt oxide prepared via cobalt acetylacetonate

Author keywords

Metal organic chemical vapour deposition (MOCVD); Oxide; Precursor; Rutherford backscattering spectroscopy (RBS); Thin film

Indexed keywords

BACKSCATTERING; CHEMICAL VAPOR DEPOSITION; COBALT; CRACKING (CHEMICAL); DIAMOND FILMS; ELECTRODEPOSITION; FILM PREPARATION; INDUSTRIAL CHEMICALS; METALS; ORGANIC CHEMICALS; ORGANOMETALLICS; OXIDE FILMS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; STOICHIOMETRY; THIN FILM DEVICES; THIN FILMS;

EID: 60949097353     PISSN: 10050302     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (9)

References (32)
  • 3
    • 60949088607 scopus 로고
    • Optical Engineering Press, Bellingham WA
    • C. M. Lampart and C. G. Granquist: SPIE, Optical Engineering Press, Bellingham WA 1990.
    • (1990) SPIE
    • Lampart, C.M.1    Granquist, C.G.2
  • 6
    • 60949103119 scopus 로고    scopus 로고
    • R. Xu: J. Metalse, 1997, 49 (10).
    • (1997) J. Metalse , vol.49 , Issue.10
    • Xu, R.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.